Presentation Details
| Improvement of Passivation for p-type Silicon Nano-crystals/Silicon Oxide Composite Layer by Atomic Hydrogen Treatment in a Catalytic Chemical Vapor Deposition System Hiroto Yamaguchi1, Shohei Fukaya1, Kazuhiro Gotoh1, 2, 3, Keisuke Ohdaira4, Markus Wilde5, Katsuyuki Fukutani5, Yasuyoshi Kurokawa1, 6, Noritaka Usami1, 6, 7. 1Graduate School of Engineering, Nagoya University, Nagoya, Japan.2Faculty of Engineering, Niigata University, Niigata, Japan.3Interdisciplinary Research Center for Carbon-Neutral Technologies, Niigata University, Niigata, Japan.4Japan Advanced Institute of Science and Technology, Nomi, Japan.5Institute of Industrial Science, The University of Tokyo, Meguro, Japan.6Institutes of Innovation for Future Society, Nagoya University, Nagoya, Japan.7Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Japan |
Abstract
In crystalline silicon solar cells, the passivation technology is critically important for achieving high conversion efficiency. Silicon nano-crystals/silicon oxide composite layers have been developed as passivation layers that provide both effective defect passivation and high conductivity. However, the performance of p-type composite layers has been insufficient, and significant improvement in passivation performance has been required for application to solar cells. Hydrogenation can enhance passivation by terminating dangling bonds at interfaces. In this study, atomic hydrogen was introduced into a p-type composite layer using a catalytic chemical vapor deposition system. The passivation performance was evaluated by measuring implied-VOC (iVOC), and hydrogen depth profiles were analyzed to quantify hydrogen incorporation. As a result, iVOC was improved by approximately 10 mV with increasing hydrogen treatment time, indicating enhanced passivation performance. Nuclear reaction analysis revealed that the hydrogen content exhibited a non-monotonic dependence on treatment time. This improvement in iVOC is suggested to be influenced by radiative heating from the high-temperature catalyzing wire, where a combined effect of hydrogen desorption and modifications in interfacial bonding states led to a reduction in dangling bonds.
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No part of this publication may be reproduced, distributed, or transmitted in any form or by any means, including photocopying, recording, or other electronic or mechanical methods, without the prior written permission of the author.
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